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Proceedings Paper

Demonstration of forming complex patterns on a Ti-film using a nanosecond pulsed laser
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Paper Abstract

It has always been difficult to process a metal film with high reflectivity in the field of manufacture, industry, medicine, and military, etc. Since much of the laser energy can be reflected especially when the reflectance of the target film surface is high, it is hard to process such a metallic film by laser radiation as the energy absorbed by the film material is very little. In this paper, we used a nanosecond pulsed laser to scribe some patterns on a smooth titanium (Ti) film, and investigated the surface morphology of a Ti film ablated by different laser spot sizes and laser energy. In our experiments, it has been found that the Ti film can be efficiently processed although the surface reflectance of the Ti film is about 57% at the wavelength of 532 nm. We also see that the processing range of the Ti film will decrease when the diameter of a laser beam increases. The experimental results show that the ablated status of the surface of a Ti film for a just-focus beam is much better than that for a defocus beam under the same laser power. Furthermore, the higher the laser power, the larger the processed area. By using the optimal parameters we obtained, we also produced some hole matrices and line patterns on a glass-based Ti film by employing a short pulsed laser. The processed samples were observed with a reflecting microscope and a transmitting microscope, respectively. Our research results can play an important role in the selection of laser parameters for laser processing of some materials with a high reflectivity.

Paper Details

Date Published: 12 March 2020
PDF: 9 pages
Proc. SPIE 11437, 2019 International Conference on Optical Instruments and Technology: Advanced Laser Technology and Applications, 114370C (12 March 2020); doi: 10.1117/12.2543459
Show Author Affiliations
Lijuan Tan, Southwest Institute of Technical Physics (China)
Univ. of Electronic Science and Technology of China (China)
Qing Luo, Southwest Institute of Technical Physics (China)
Univ. of Electronic Science and Technology of China (China)
Xiaoxu Liu, Southwest Institute of Technical Physics (China)
Peng Wu, Univ. of Electronic Science and Technology of China (China)
Yunru Fan, Univ. of Electronic Science and Technology of China (China)
Haoyu Li, Southwest Institute of Technical Physics (China)
Juhong Han, Southwest Institute of Technical Physics (China)
Guangwei Deng, Univ. of Electronic Science and Technology of China (China)
Qiang Zhou, Univ. of Electronic Science and Technology of China (China)
Haizhi Song, Southwest Institute of Technical Physics (China)
Univ. of Electronic Science and Technology of China (China)
You Wang, Southwest Institute of Technical Physics (China)
Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 11437:
2019 International Conference on Optical Instruments and Technology: Advanced Laser Technology and Applications
Zhiyi Wei; Chunqing Gao; Pu Wang; Franz X, Kärtner; Stefan A. Weber, Editor(s)

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