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Proceedings Paper

Block copolymers with a fluoro-block for 5 nm DSA patterning application
Author(s): Xuemiao Li; Zhilong Li; Le Dai; Hui Cao; Hai Deng
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Paper Abstract

In this manuscript, various fluorine-containing BCPs were synthesized by living anionic polymerization or reversible addition−fragmentation chain-transfer (RAFT) polymerization. The resulted BCPs showed high χ value > 0.2. With similar χ value, we observed that PS-typed BCPs formed microdomains of 5 nm within 1 min at 80°C, whereas polymethacrylate-typed ones required 1 h annealing at 160°C. When rigid side chain was incorporated into the polymethacrylate block, the annealing time can be shortened to 5 min at 160°C. However, the poor film formation of the such BCP with rod-like side chain resulted in rough line pattern after the thermal annealing process. The polymethacrylate-typed BCPs generally requires high boiling point solvents for better film formation and better line patterning.

Paper Details

Date Published: 23 March 2020
PDF: 5 pages
Proc. SPIE 11326, Advances in Patterning Materials and Processes XXXVII, 113261E (23 March 2020); doi: 10.1117/12.2543121
Show Author Affiliations
Xuemiao Li, Fudan Univ. (China)
Zhilong Li, Fudan Univ. (China)
Le Dai, Fudan Univ. (China)
Hui Cao, Fudan Univ. (China)
Hai Deng, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 11326:
Advances in Patterning Materials and Processes XXXVII
Roel Gronheid; Daniel P. Sanders, Editor(s)

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