Share Email Print
cover

Proceedings Paper

A robust white light interference signal processing technique and instrument design
Author(s): Long Ma; Jun Jia; Xin Pei; Meiye Du; Jirui Liu; Yuzhe Liu; Ruijie Qian
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

As an important ultra-precision measurement method, white light interferometry is widely used in 3D measurements with nanometer resolution. In this paper, a white light interferometer is designed with a random phase noise insensitive algorithm. A discrete interferogram is established by analyzing the phase noise, which is modelized by the combination of random noise and systematic deviation. After Fourier analysis, the mathematical expression of the discrete interferogram in frequency domain is derived, where the random noise can be estimated by least square method and then be corrected. As a result, a more accurate relationship between phase distribution and surface height is established. To set up an stable system, the scanner of white light interferometer is driven by a precision step motor with scanning range 100 mm, and the travel range of the object stage in x and y directions is 60 mm. In the experiment, a step height standard (VLSI, 182.7±2.0 nm) and the end face of a multi-mode optical fiber are tested, where the repeatability error for the step height is less than 0.28%, which proves the measurement accuracy and robustness of the system.

Paper Details

Date Published: 12 March 2020
PDF: 6 pages
Proc. SPIE 11434, 2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 114340J (12 March 2020); doi: 10.1117/12.2542982
Show Author Affiliations
Long Ma, Civil Aviation Univ. of China (China)
Jun Jia, Civil Aviation Univ. of China (China)
Xin Pei, Civil Aviation Univ. of China (China)
Meiye Du, Civil Aviation Univ. of China (China)
Jirui Liu, Civil Aviation Univ. of China (China)
Yuzhe Liu, Civil Aviation Univ. of China (China)
Ruijie Qian, Civil Aviation Univ. of China (China)


Published in SPIE Proceedings Vol. 11434:
2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Juan Liu; Baohua Jia; Xincheng Yao; Yongtian Wang; Takanori Nomura, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray