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Proceedings Paper

Rapid prototyping MEMS with laminated resin printing
Author(s): Harrison B. Jones; Ciaran P. Moore; Andrew D. Best; Andrea J. Bubendorfer; Neil D. Glasson
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Paper Abstract

Interest in MEMS fabrication has been growing for the last 50 years; however, the number and quality of tools supporting rapid prototyping in this industry are limited. Laminated resin printing (LRP) combines maskless projector-based lithography with 3D printing techniques to facilitate the rapid production of high-resolution polymer structures in three dimensions with no retooling required. By selectively metalising these structures, high value functional MEMS devices can be rapidly produced, tested and iterated. Microcircuits, enclosed mechanical systems and devices based on cantilevers and membranes have all been demonstrated using this technique.

Paper Details

Date Published: 28 February 2020
PDF: 9 pages
Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 1129407 (28 February 2020); doi: 10.1117/12.2542968
Show Author Affiliations
Harrison B. Jones, Callaghan Innovation (New Zealand)
Ciaran P. Moore, Univ. of Canterbury (New Zealand)
Andrew D. Best, Callaghan Innovation (New Zealand)
Andrea J. Bubendorfer, Callaghan Innovation (New Zealand)
Neil D. Glasson, Callaghan Innovation (New Zealand)

Published in SPIE Proceedings Vol. 11294:
Emerging Digital Micromirror Device Based Systems and Applications XII
John Ehmke; Benjamin L. Lee, Editor(s)

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