The quanta image sensor (QIS) is a novel CMOS-based image sensor capable of photon counting without the necessity of avalanche gain. The QIS reported in this work is implemented in a state-of-the-art backside-illuminated (BSI) CMOS image sensor commercial stacking (3D) process. The detector wafer consists of a megapixel array of specialized active pixels known as “jots” and the ASIC readout wafer utilizes cluster-based readout circuitry. This specialized pixel architecture and cluster readout circuits allow for the QIS to achieve accurate photon-counting capabilities with average read noise of 0.23e- rms, average conversion gain of 345μV/e-, and average dark current less than 0.1e-/sec/jot at room temperature without active cooling.

Date Published: 31 January 2020
PDF: 8 pages
Proc. SPIE 11288, Quantum Sensing and Nano Electronics and Photonics XVII, 1128826 (31 January 2020); doi: 10.1117/12.2542862

Published in SPIE Proceedings Vol. 11288:
Quantum Sensing and Nano Electronics and Photonics XVII
Manijeh Razeghi; Jay S. Lewis; Giti A. Khodaparast; Pedram Khalili, Editor(s)