Coherence scanning interferometry (CSI) is a precise and versatile method to measure the shape of objects with rough and smooth surface. However, this method requires a large amount of raw data. The demands on increasing measurement speed and camera resolution require to reduce the number of camera frames. We present an evaluation technique that allows a direct reconstruction of the interferograms envelope. An octadical wave plate is inserted into the reference arm of the interferometer. Thus two signals arise, each for one polarization state, that are shifted by 90 degrees to each other. From the two signals, a direct reconstruction of the interferograms envelope is possible.

Date Published: 30 December 2019
PDF: 6 pages
Proc. SPIE 11385, Optics and Measurement International Conference 2019, 113850E (30 December 2019); doi: 10.1117/12.2542811

Published in SPIE Proceedings Vol. 11385:
Optics and Measurement International Conference 2019
Jana Kovačičinová, Editor(s)