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Proceedings Paper

Fast deflectometric measurement of freeform surfaces for ultra-precision optical manufacturing
Author(s): Xiangchao Zhang; Xueyang Xu; Zhenqi Niu; Rui Zhu; Min Xu
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Paper Abstract

The measurement of freeform optical surfaces is a challenging task in precision manufacturing. Those widely used instruments such as the point-scanning profiler and sub-aperture stitching interferometer are costly expensive and time consuming. The phase measuring deflectometry is a powerful measuring technique for complex optical surfaces. To image the measuring efficiency and reduce the number of the captured images, the modulating information can be reutilized in the second direction in the bi-directional phase shifting, so that totally only 6 images are needed. The tracing deviations caused by the form errors behave differently with those caused by the position errors. Then precise localization of the measured surface can be realized by error separation, so that detecting of feature points can be avoided. Experimental results demonstrate that the measurement error is below 150 nm.

Paper Details

Date Published: 12 March 2020
PDF: 8 pages
Proc. SPIE 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 114390H (12 March 2020); doi: 10.1117/12.2542537
Show Author Affiliations
Xiangchao Zhang, Fudan Univ. (China)
Xueyang Xu, Fudan Univ. (China)
Zhenqi Niu, Fudan Univ. (China)
Rui Zhu, Fudan Univ. (China)
Min Xu, Fudan Univ. (China)


Published in SPIE Proceedings Vol. 11439:
2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Jigui Zhu; Kexin Xu; Hai Xiao; Sen Han, Editor(s)

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