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Ultra-precision grinding of transparent AlON optical window
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Paper Abstract

A series of ultra-precision grinding experiments were carried out on transparent AlON ceramic. The grinding parameters (wheel speed, workpiece speed, feedrate and depth of grinding) were optimized by studying the influence of process parameters on surface quality. Comprehensive consideration of surface quality and machining efficiency, the grinding process parameters selected for finishing are as bellow: the wheel speed is 6000rpm, the workpiece speed is 39rpm, the feedrate is 5mm/min and the depth of grinding is 3μm. A grinding verification experiment was carried out after optimization. According to the optimized process parameters, the AlON optical window (the diameter is 120mm, the length-diameter ratio is 1.08, the thickness is 3mm) was processed by ultra-precision grinding. The form accuracy, surface roughness and infrared transmittance of the AlON optical window were tested and discussed.

Paper Details

Date Published: 20 December 2019
PDF: 5 pages
Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112090A (20 December 2019); doi: 10.1117/12.2542410
Show Author Affiliations
Chunyu Zhang, Harbin Institute of Technology (China)
Han Liu, Harbin Institute of Technology (China)
Qingliang Zhao, Harbin Institute of Technology (China)
Bing Guo, Harbin Institute of Technology (China)
Jinhu Wang, Zhejiang Univ. of Technology (China)


Published in SPIE Proceedings Vol. 11209:
Eleventh International Conference on Information Optics and Photonics (CIOP 2019)
Hannan Wang, Editor(s)

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