Micro-focus x-ray sources have been wildly applied to more and more fields，such as medical treatment, industrial area and aerospace. As the core indicator of micro-focus x-ray sources, the focal spot size directly affects performance of application scenarios. The smaller the focal spot size, the higher the resolution of micro-focus x-ray sources. So it is vitally important of accurately measuring the focal spot size. Three classic measurement standards of x-ray focal spot size, including the EN 12543, the IEC 60336 and the ASTM E 1165, have been introduced in detail. And the measurement principles, adaptive range, application objects and processing method of tested data are analyzed and compared. Then on this basis of three classic measurement standards, several measurement methods, scanning method, pinhole camera radiographic method, slit camera radiographic method, edge method and measurement of the effective focal spot size of mini and micro focus x-ray tubes, are expatiated. Additionally, advantages and disadvantages of various methods are expounded to readers, and some references are offered to demanders.

Date Published: 12 March 2020
PDF: 7 pages
Proc. SPIE 11434, 2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 114340C (12 March 2020); doi: 10.1117/12.2542372

Published in SPIE Proceedings Vol. 11434:
2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Juan Liu; Baohua Jia; Xincheng Yao; Yongtian Wang; Takanori Nomura, Editor(s)