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Proceedings Paper

Formation of micro-groove on diamond by femtosecond laser micromachining
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Paper Abstract

Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.

Paper Details

Date Published: 31 December 2019
PDF: 2 pages
Proc. SPIE 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019, 112011N (31 December 2019); doi: 10.1117/12.2542281
Show Author Affiliations
Ryoji Maruyama, Ritsumeikan Univ. (Japan)
Takayuki Tamaki, National Institute of Technology (Japan)
Wataru Watanabe, Ritsumeikan Univ. (Japan)

Published in SPIE Proceedings Vol. 11201:
SPIE Micro + Nano Materials, Devices, and Applications 2019
M. Cather Simpson; Saulius Juodkazis, Editor(s)

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