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Proceedings Paper

Vertical directional coupler network using a-Si slope waveguides
Author(s): V. Mittal; R. Petra; A. Tarazona; N. J. Dinsdale; A. Khokhar; M. Banakar; D. Thomson; O. L. Musken; G. T. Reed; H. M. H. Chong
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Paper Abstract

A CMOS compatible three-dimensional (3D) integrated photonics circuit for multilayer silicon photonics is reported. Slopes with angles between 10o and 15° were created in the oxide layer using single step wet etching to connect the two Si waveguide layers. Amorphous Si (a-Si) deposited using hot wire chemical vapor deposition (HWCVD) at a temperature of 230°C was used to fabricate the device. Losses of 0.5 dB/slope were measured in the slope waveguides at 1310 nm wavelength. As a demonstration, we propose a 4x4 network switch using a-Si based vertical directional coupler.

Paper Details

Date Published: 30 December 2019
PDF: 2 pages
Proc. SPIE 11200, AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019, 112001W (30 December 2019); doi: 10.1117/12.2542213
Show Author Affiliations
V. Mittal, Univ. of Southampton (United Kingdom)
R. Petra, Univ. of Southampton (United Kingdom)
Univ. Teknologi Brunei (Brunei Darussalam)
A. Tarazona, Univ. of Southampton (United Kingdom)
N. J. Dinsdale, Univ. of Southampton (United Kingdom)
A. Khokhar, Univ. of Southampton (United Kingdom)
M. Banakar, Univ. of Southampton (United Kingdom)
D. Thomson, Univ. of Southampton (United Kingdom)
O. L. Musken, Univ. of Southampton (United Kingdom)
G. T. Reed, Univ. of Southampton (United Kingdom)
H. M. H. Chong, Univ. of Southampton (United Kingdom)


Published in SPIE Proceedings Vol. 11200:
AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019
Arnan Mitchell; Halina Rubinsztein-Dunlop, Editor(s)

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