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Proceedings Paper

Hybrid ultrasound-detection platform based on silicon photonics and transparent polymers (Conference Presentation)

Paper Abstract

Silicon photonics represents an attractive platform for optical sensing of ultrasound owing to the high light confinement it can achieved, which can enable the development of detector with sub-micron sizes. However, the small elasto-optic coefficients of silicon and silica limit the sensitivity of conventional silicon-on-insulator (SOI) sensors, in which the silicon core is surrounded by a silica cladding. In this work, we demonstrate an order-of-magnitude increase in the response of a silicon-photonics waveguide to ultrasound by replacing the silica over-cladding with bisbenzocyclobutene (BCB) - a transparent polymer with a high elasto-optic coefficient.

Paper Details

Date Published: 6 March 2020
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Proc. SPIE 11240, Photons Plus Ultrasound: Imaging and Sensing 2020, 112400X (6 March 2020); doi: 10.1117/12.2542155
Show Author Affiliations
Resmi R. Kumar, Technion-Israel Institute of Technology (Israel)
Evgeny Hahamovich, Technion-Israel Institute of Technology (Israel)
Shai Tsesses, Technion-Israel Institute of Technology (Israel)
Yoav Hazan, Technion-Israel Institute of Technology (Israel)
Assaf Grinberg, Technion-Israel Institute of Technology (Israel)
Amir Rosenthal, Technion-Israel Institute of Technology (Israel)


Published in SPIE Proceedings Vol. 11240:
Photons Plus Ultrasound: Imaging and Sensing 2020
Alexander A. Oraevsky; Lihong V. Wang, Editor(s)

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