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Proceedings Paper

Nanostructured trampoline microcavities for sensing and optomechanics
Author(s): Aurélien Dantan
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Paper Abstract

Microcavities using high mechanical quality suspended thin films as flexible mirrors can be exquisitely sensitive to gas or radiation pressure changes. We demonstrate how to directly pattern thin (200 nm), suspended silicon nitride membranes with subwavelength gratings in order to enhance their reflectivity. We discuss how using such nanostructured trampolines to form ultrashort microcavities may lead to a combination of small modevolume and remarkably narrow linewidth which is interesting for improving the sensitivity of optical sensors or for cavity optomechanics. Using high mechanical quality nanotrampolines to form few-micron long sandwiches we realize squeeze film pressure sensors in which the modifications of their vibrations due to the compression of the gas between them are measured optically and whose state-of-the-art responsitivity and sensitivity are promising for absolute pressure measurements in the free molecular flow regime.

Paper Details

Date Published: 26 February 2020
PDF: 9 pages
Proc. SPIE 11290, High Contrast Metastructures IX, 112901M (26 February 2020); doi: 10.1117/12.2542106
Show Author Affiliations
Aurélien Dantan, Univ. of Aarhus (Denmark)


Published in SPIE Proceedings Vol. 11290:
High Contrast Metastructures IX
Connie J. Chang-Hasnain; Andrei Faraon; Weimin Zhou, Editor(s)

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