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A multi-pass interferometer for high resolution angular measurement
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Paper Abstract

Angular displacement mechanisms are widely used in X-ray diffraction and the nrad resolution is essential for high resolution X-ray diffractor. A multi-pass differential interferometer is designed to improve the resolution of the angel to ~ 10 nrad by increasing the optical pass length. For common interferometer based on Michelson interferometry, nonlinearity is caused by phase mixing due to the imperfect of polarization optical components in both homodyne and heterodyne interferometers. In this angular measurement interferometer, the laser beam of the reference path and measuring path are separated to eliminate the mixture and to reduce the nonlinearity. The four-pass design of the reference and measuring beam improve the resolution. The performance of the interferometer can be used measure the small angle generated by compact piezo driven flexure hinge stage.

Paper Details

Date Published: 13 November 2019
PDF: 4 pages
Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 1134308 (13 November 2019); doi: 10.1117/12.2542085
Show Author Affiliations
Wei Li, National Institute of Metrology (China)
Sitian Gao, National Institute of Metrology (China)
Yushu Shi, National Institute of Metrology (China)
Qi Li, National Institute of Metrology (China)
Shi Li, National Institute of Metrology (China)
Lu Huang, National Institute of Metrology (China)


Published in SPIE Proceedings Vol. 11343:
Ninth International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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