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Proceedings Paper

Compact high-stability and low-nonlinearity heterodyne grating interferometer
Author(s): Cunbao Lin; Yurong Liao; Zhaoming Li; Dan Ding
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Paper Abstract

A heterodyne grating interferometer (HGI) with high stability and low nonlinearity is presented. An optical arrangement with Littrow configuration combined with Wollaston prism is proposed for the HGI. The compact and symmetrical design make it insensitive to environmental disturbances. The optimal separate angle of the Wollaston prism is investigated with rigorous coupled-wave analysis (RCWA), and the value of 44° corresponding to the grating pitch of 845 nm is selected. The approximately equal diffraction efficiencies of 76.54% and 76.64% for TE and TM polarizations are respectively obtained, which is beneficial to the signal-to-noise ratio (SNR) of HGI. Additionally, the nonlinear errors including polarization mixing, frequency mixing and polarization-frequency mixing are analyzed. The polarization mixing error is dramatically decreased owing to the high extinction ratio of Wollaston prism. It reveals that the developed HGI has the potential for nanometric displacement measurement.

Paper Details

Date Published: 12 March 2020
PDF: 9 pages
Proc. SPIE 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 114390E (12 March 2020); doi: 10.1117/12.2541950
Show Author Affiliations
Cunbao Lin, Space Engineering Univ. (China)
Yurong Liao, Space Engineering Univ. (China)
Zhaoming Li, Space Engineering Univ. (China)
Dan Ding, Space Engineering Univ. (China)


Published in SPIE Proceedings Vol. 11439:
2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Jigui Zhu; Kexin Xu; Hai Xiao; Sen Han, Editor(s)

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