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Image grating: a novel technology for position measurement
Author(s): Shaowei Fu; Fang Cheng; Tegoeh Tjahjowidodo; Mengjun Liu
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Paper Abstract

A novel position measurement system, the so-called image grating system, is presented in this research paper. It features an adjustable measurement range, flexible standoff distance and in-line measurement capabilities. The developed position measurement system includes an image grating attached to the moving stage as the target feature and a line scan camera as the stationary displacement reader. By observing the position of the target feature in the image and applying subpixel image registration, the position of the moving stage can be determined. In order to improve the measurement efficiency, the computations for pattern correlation and subpixel registration are performed in the frequency domain. Calibration and error correction methods are also developed to compensate for the measurement error caused by optical distortion. Experimental data confirms the capability of the image grating technology of ±0.2 μm measurement accuracy within 25 mm measurement range. By applying different optics, the standoff distance and the measurement range can be customized for different precision measurement applications.

Paper Details

Date Published: 16 October 2019
PDF: 7 pages
Proc. SPIE 11205, Seventh International Conference on Optical and Photonic Engineering (icOPEN 2019), 112051I (16 October 2019); doi: 10.1117/12.2541647
Show Author Affiliations
Shaowei Fu, Agency for Science, Technology and Research (Singapore)
Nanyang Technological Univ. (Singapore)
Fang Cheng, Agency for Science, Technology and Research (Singapore)
Tegoeh Tjahjowidodo, Agency for Science, Technology and Research (Singapore)
Nanyang Technological Univ. (Singapore)
Mengjun Liu, Agency for Science, Technology and Research (Singapore)


Published in SPIE Proceedings Vol. 11205:
Seventh International Conference on Optical and Photonic Engineering (icOPEN 2019)
Anand Asundi; Motoharu Fujigaki; Huimin Xie; Qican Zhang; Song Zhang; Jianguo Zhu; Qian Kemao, Editor(s)

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