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Proceedings Paper

Study on improvement of the accuracy of scanning electron microscope: energy dispersed spectroscopy quantitative analysis
Author(s): Cong Cao; Jian Zhang; Mengmeng Dou; Dongsheng Zhao
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Paper Abstract

With the development of science and technology, scanning electron microscope - energy dispersed spectroscopy (SEM-EDS) with its advantages of convenience, easy operation and high reliability become the most widely used instrument in micro-beam analysis field. EDS sometimes is considered as a semi-quantitative or even qualitative instrument compared with WDS and other chemical methods in element type and composition analysis. However, SEM-EDS can provide accurate results if parameters are set properly. This paper discusses how to improve the accuracy of EDS quantitative analysis by changing SEM and EDS working conditions.

Paper Details

Date Published: 13 November 2019
PDF: 6 pages
Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 1134304 (13 November 2019); doi: 10.1117/12.2541537
Show Author Affiliations
Cong Cao, Shandong Institute of Metrology (China)
Jian Zhang, Shandong Institute of Metrology (China)
Mengmeng Dou, Weifang Institute of Metrology (China)
Dongsheng Zhao, Shandong Institute of Metrology (China)

Published in SPIE Proceedings Vol. 11343:
Ninth International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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