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Compensation of nonlinear errors of phase-shifted fringes in phase measuring deflectometry
Author(s): Zhenqi Niu; Xiangchao Zhang; Xueyang Xu; Yifan Zhu; Shaoliang Li; Siping Peng
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Paper Abstract

In the phase measuring deflectometry, the phase error caused by the nonlinear intensity response, called the gamma distortion, can negatively affect the measurement quality of specular surfaces. Based on the generic exponential four-step phase-shifting fringe modal, this paper proposes a flexible and simple phase retrieval method to eliminate the phase errors without complex calibration or additional fringe patterns. The experimental results illustrate that the proposed method can accurately retrieve the phases from the distorted fringe patterns with the Gamma distortion, and the measurement precision can henceforth be improved.

Paper Details

Date Published: 13 November 2019
PDF: 5 pages
Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 1134303 (13 November 2019); doi: 10.1117/12.2541472
Show Author Affiliations
Zhenqi Niu, Fudan Univ. (China)
Xiangchao Zhang, Fudan Univ. (China)
Xueyang Xu, Fudan Univ. (China)
Yifan Zhu, Fudan Univ. (China)
Shaoliang Li, Shanghai Institute of Spaceflight Control Technology (China)
Siping Peng, Shanghai Radio Equipment Research Institute (China)


Published in SPIE Proceedings Vol. 11343:
Ninth International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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