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Femtosecond laser 3D nanoprinting for functional devices
Author(s): Hong-Bo Sun; Bing Han
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Paper Abstract

Laser nanofabrication is a powerful technique, which could realize 3D programming of materials for the designable fabrication and flexible integration of 3D intelligent devices. No matter hard or soft materials can be manufactured or modified through femtosecond laser. 3D fuchtional devices, including micro-electronics, machines, optics or fluidics are successfully made by this powerful technology. Smart functional devices that could be controllably manipulated to complete predictable actuation have been readily fabricated through laser processing. Recent results on femtosecond laser 3D nanoprinting for functional devices are demonstrated. We believe that in the near future, the femtosecond laser smart processing technology would be widely employed to make smart materials with 3D features, contributing to the development of 3D functional materials, devices, system and robotics.

Paper Details

Date Published: 31 December 2019
PDF: 2 pages
Proc. SPIE 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019, 1120104 (31 December 2019); doi: 10.1117/12.2541304
Show Author Affiliations
Hong-Bo Sun, Tsinghua Univ. (China)
Bing Han, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 11201:
SPIE Micro + Nano Materials, Devices, and Applications 2019
M. Cather Simpson; Saulius Juodkazis, Editor(s)

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