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Proceedings Paper

Evolution of femtosecond laser-induced periodic structures: from nanoholes to regular structures
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Paper Abstract

Femtosecond laser-induced periodic surface structures have opened broad prospects in the aspect of high-efficient and low-cost nanotextured patterning, yet defined great challenges on how to keep the periodicity in a macro area. Herein, we report a transition from non-periodicity to periodicity as the scan strategies changing. By suppressing the transition from the initial structures to the nanogratings with long-range order, arbitrary high-resolution direct writing patterns have been obtained in a large area. We attribute this phenomenon to the dynamic evolution of the near-field energy deposition around the pre-existing structures. This approach paves another way to high-precision laser processing.

Paper Details

Date Published: 31 December 2019
PDF: 2 pages
Proc. SPIE 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019, 1120115 (31 December 2019); doi: 10.1117/12.2541301
Show Author Affiliations
Zhen-Ze Li, Jilin Univ. (China)
Lei Wang, Jilin Univ. (China)
Hua Fan, Jilin Univ. (China)
Yan-Hao Yu, Jilin Univ. (China)
Qi-Dai Chen, Jilin Univ. (China)
Saulius Juodkazis, Swinburne Univ. of Technology (Australia)
Melbourne Ctr. for Nanofabrication (Australia)
Hong-Bo Sun, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 11201:
SPIE Micro + Nano Materials, Devices, and Applications 2019
M. Cather Simpson; Saulius Juodkazis, Editor(s)

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