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Proceedings Paper

Simulation of terahertz waves in multilayer coatings for non-contact thickness measurements of top layers
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Paper Abstract

This work addresses simulations of terahertz waves for the determination of layer thicknesses, in particular to analyze the top layers of multilayer coatings. For such analyses, a relatively short measuring time window is possible, which leads to time savings. However, not every simulation method takes time limitations of measuring windows into account. Therefore, we compare different simulation methods and adapt one of them to our application.

Paper Details

Date Published: 2 March 2020
PDF: 11 pages
Proc. SPIE 11279, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII, 112790J (2 March 2020); doi: 10.1117/12.2541298
Show Author Affiliations
Imke Busboom, Düsseldorf Univ. of Applied Sciences (Germany)
Simon Christmann, Düsseldorf Univ. of Applied Sciences (Germany)
Hartmut Haehnel, Düsseldorf Univ. of Applied Sciences (Germany)
Volker K. S. Feige, Düsseldorf Univ. of Applied Sciences (Germany)
Bernd Tibken, Univ. of Wuppertal (Germany)


Published in SPIE Proceedings Vol. 11279:
Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII
Laurence P. Sadwick; Tianxin Yang, Editor(s)

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