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Proceedings Paper

Investigation on damage process of indium tin oxide film induced by 1064nm quasi-CW laser
Author(s): Liping Peng; Yuan'an Zhao; Xiaofeng Liu; Zhaoliang Cao; Jianda Shao; Ruijin Hong; Chunxian Tao; Dawei Zhang; Xi Wang
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Paper Abstract

Quasi-CW laser damage process of indium tin oxide (ITO) thin film was investigated. The ITO film with thickness of 300 nm was deposited on fused silica substrate by magnetron sputtering. Experiments were conducted on quasi-CW laser with wavelength of 1064 nm, and the test was executed in single shot test with radiation time of 60 s. The damage morphologies were observed via optical microscope and scanning electron microscope (SEM). The apparent damage started with change in color which the morphologies were visible to the naked eyes. With the power density higher than the laser induced damage threshold (LIDT), there were cracks in the center of the damage site. The temperature distribution of the ITO thin film was investigated based on the heat equation.

Paper Details

Date Published: 8 July 2019
PDF: 7 pages
Proc. SPIE 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers, 1106302 (8 July 2019); doi: 10.1117/12.2540821
Show Author Affiliations
Liping Peng, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Science (China)
Key Lab. of Materials for High Power Laser (China)
Yuan'an Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xiaofeng Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
National Univ. of Defense Technology (China)
Zhaoliang Cao, Suzhou Univ. of Science and Technology (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Key Lab. of Materials for High Power Laser (China)
Ruijin Hong, Univ. of Shanghai for Science and Technology (China)
Chunxian Tao, Univ. of Shanghai for Science and Technology (China)
Dawei Zhang, Univ. of Shanghai for Science and Technology (China)
Xi Wang, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 11063:
Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)

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