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Proceedings Paper

Parylene-C diaphragm-based fiber-optic gas sensor based on photoacoustic spectroscopy
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Paper Abstract

A low-frequency photoacoustic (PA) sensor based on Parylene-C diaphragm for micro-leakage gas detection is presented. The overall structure of the sensor head includes a cylindrical brass shell, a Parylene-C diaphragm, and a PA cavity regarded as a Fabry-Perot (F-P) cavity as well. The volume of the PA cavity is only 74 μL. A distributed feedback (DFB) laser is used as an acoustic excitation source. The PA pressure signal is obtained by measuring the deflection of the Parylene-C diaphragm using fiber-optic white-light interference (WLI) method. The PA sensor head is used for acetylene (C2H2) detection. A detection limit of 36 parts-per-billion (ppb) is achieved when the lock-in integration time is 1 s.

Paper Details

Date Published: 12 March 2020
PDF: 6 pages
Proc. SPIE 11438, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology, 1143803 (12 March 2020); doi: 10.1117/12.2540483
Show Author Affiliations
Zhenfeng Gong, Dalian Univ. of Technology (China)
Tianli Gao, Dalian Univ. of Technology (China)
Yewei Chen, Dalian Univ. of Technology (China)
Yexiang Jiao, Dalian Univ. of Technology (China)
Ke Chen, Dalian Univ. of Technology (China)
Qingxu Yu, Dalian Univ. of Technology (China)


Published in SPIE Proceedings Vol. 11438:
2019 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology
Guohai Situ; Xun Cao; Wolfgang Osten, Editor(s)

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