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Proceedings Paper

Surface profile measurement based on continuous wavelet transform in line-scan dispersive interferometry
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Paper Abstract

This paper presents a signal processing method based on continuous wavelet transform in our line-scan dispersive interferometric system. Our method enables us to extract phase information from the spectrum by applying continuous wavelet transform, which is more effective and reliable in analyzing non-stationary signal compared with FT transform. Experimental results obtained by measuring a step standard with a height of 1.806μm reveal that this method has high accuracy and a good performance over noise resistance, which makes it suitable for complicated in-line measurement condition.

Paper Details

Date Published: 12 March 2020
PDF: 8 pages
Proc. SPIE 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 1143903 (12 March 2020); doi: 10.1117/12.2540385
Show Author Affiliations
Guanhua Zhao, Tianjin Univ. (China)
Tong Guo, Tianjin Univ. (China)
Qianwen Weng, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 11439:
2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Jigui Zhu; Kexin Xu; Hai Xiao; Sen Han, Editor(s)

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