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A comparative study on reflection of broadband EUV multilayer mirrors basing on Levenberg-Marquardt algorithm
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Paper Abstract

In this paper, a local optimization algorithm (Levenberg-Marquardt algorithm) is employed for broadband EUV multilayer design. A merit function is optimized in the Levenberg-Marquardt algorithm, for achieving maximum reflectivity of the designed broadband EUV multilayer mirrors. Using this algorithm, the reflectivity of broadband EUV multilayer mirrors with different broadband for various central photon energy are designed and compared. Under the condition of normal incidence, the maximum average reflectivity of designed broadband EUV multilayer mirrors with 20 eV bandwidth for 40 eV, 60 eV and 80 eV central photon energy are 6%, 16% and 21% respectively, while the ones with 10 eV, 20 eV and 30 eV bandwidth for 80 eV central photon energy are 29%, 21% and 15% respectively. In addition, the effect of incident angle on the reflectivity of broadband EUV multilayer mirrors is also studied. It is found that the maximum average reflectivity of designed broadband EUV multilayer mirror with 20 eV bandwidth for 80 eV central photon energy increases from 21% to 53%, when the incident angle of light increases from 0° to 60°. We believe this research is important because it provides a guide for the design of broadband EUV multilayer mirrors with high reflectivity.

Paper Details

Date Published: 18 December 2019
PDF: 8 pages
Proc. SPIE 11336, AOPC 2019: Nanophotonics, 1133603 (18 December 2019); doi: 10.1117/12.2540284
Show Author Affiliations
Zhining Lin, Beijing Univ. of Chemical Technology (China)
Shujing Chen, China Univ. of Geosciences (China)
Chengyou Lin, Beijing Univ. of Chemical Technology (China)


Published in SPIE Proceedings Vol. 11336:
AOPC 2019: Nanophotonics
Zhiping Zhou; Xiao-Cong Yuan; Daoxin Dai, Editor(s)

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