Share Email Print
cover

Proceedings Paper

Removal of particle contaminations on sol-gel coated fused silica surface by laser cleaning
Author(s): Jingxuan Wang; Naihao Guo; Jihua Zhang; Wei Liao; Xia Xiang; Xiaodong Jiang
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Efficient removal of SiO2 contaminated particles from sol-gel SiO2 filmed fused silica surface was achieved by single shot dry laser cleaning and airflow displacement system assisted laser cleaning using a Q switched Nd:YAG pulse laser at 355 nm in wavelength. The experiment result shows that for single-shot laser dry cleaning of sol-gel film fused silica samples under the condition of satisfying the theoretical cleaning threshold, the optimal laser energy density was 2.28 J/cm2, which is different from the process parameters of uncoated fused silica. In the optimal process parameters, single shot laser cleaning had obvious cleaning effect on SiO2 particles with particle diameter larger than 1 μm, and the removal ratio was 64.81%. When the density of particle was too high, the cleaning effect was weakened and the damage to the substrate was caused. The re-attachment of crushed particles also leaded to making the cleaning effect worse. The airflow displacement system assisted laser cleaning method further enhanced the effect of removing the optical surface contaminated particles and the decontamination efficiency was improved to 80.53% at 1.71 J/cm2. Our results demonstrated that airflow displacement system will be useful for single shot dry laser cleaning of SiO2 particles on an optical surface of fused silica.

Paper Details

Date Published: 8 July 2019
PDF: 7 pages
Proc. SPIE 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers, 110630B (8 July 2019); doi: 10.1117/12.2539597
Show Author Affiliations
Jingxuan Wang, Research Ctr. of Laser Fusion (China)
Naihao Guo, Univ. of Electronic Science and Technology of China (China)
Jihua Zhang, Univ. of Electronic Science and Technology of China (China)
Wei Liao, Research Ctr. of Laser Fusion (China)
Xia Xiang, Univ. of Electronic Science and Technology of China (China)
Xiaodong Jiang, Research Ctr. of Laser Fusion (China)


Published in SPIE Proceedings Vol. 11063:
Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray