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Proceedings Paper

Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor
Author(s): Boling Ouyang; Yanlu Li; Marten Kruidhof; Roland Horsten; Roel Baets; Koen W. A. van Dongen; Jacob Caro
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Paper Abstract

We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane’s vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a −6 dB bandwidth of 21.2%. For 1.0 mW optical input power, we obtain a high sensitivity of 0.62 mV/Pa, a low detection limit of 0.38 mPa/Hz1/2 at the resonance frequency and a large dynamic range of 59 dB. In preliminary ultrasound imaging experiments using this sensor, an image of a wire phantom is obtained. The properties of this sensor and the generated image show that this sensor is very promising for ultrasound imaging applications.

Paper Details

Date Published: 25 February 2020
PDF: 9 pages
Proc. SPIE 11283, Integrated Optics: Devices, Materials, and Technologies XXIV, 112830R (25 February 2020); doi: 10.1117/12.2539573
Show Author Affiliations
Boling Ouyang, Technische Univ. Delft (Netherlands)
Yanlu Li, Univ. Gent (Belgium)
Marten Kruidhof, Technische Univ. Delft (Netherlands)
Roland Horsten, Technische Univ. Delft (Netherlands)
Roel Baets, Univ. Gent (Belgium)
Koen W. A. van Dongen, Technische Univ. Delft (Netherlands)
Jacob Caro, Technische Univ. Delft (Netherlands)

Published in SPIE Proceedings Vol. 11283:
Integrated Optics: Devices, Materials, and Technologies XXIV
Sonia M. García-Blanco; Pavel Cheben, Editor(s)

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