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Investigation on lateral resolution of surface slope profilers
Author(s): Valeriy V. Yashchuk; Ian Lacey; Thomas Arnold; Hendrik Paetzelt; Simon Rochester; Frank Siewert; Peter Z. Takacs
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Paper Abstract

We investigate and compare the spatial (lateral) resolution, or more generally, the optical/instrumental transfer function (OTF/ITF) of surface slope measuring profilometers of two different types that are commonly used for high accuracy characterization of x-ray optics at the long-spatial-wavelength range. These are an autocollimator based profiler, Optical Surface Measuring System (OSMS), and a long trace profiler, LTP-II, both available at the Advanced Light Source (ALS) X˗Ray Optics Lab (XROL). In the OSMS, an ELCOMAT-3000 electronic auto-collimator, vertically mounted to the translation carriage and equipped with an aperture of 2.5 mm diameter, is scanned along the surface under test. The LTP˗II OTF has been measured for two different configurations, a classical two-beam pencil-beam-interferometry and a single-Gaussian-beam deflectometry. For the ITF calibration, we apply a recently developed method based on test surfaces with one-dimensional (1D) linear chirped height profiles of constant slope amplitude. Analytical expressions for the OTFs, empirically deduced based on the experimental results, are presented. We also discuss the application of the results of the ITF measurements and modeling to improve the surface slope metrology with state-of-the-art x-ray mirrors. This work was supported by the U. S. Department of Energy under contract number DE-AC02-05CH11231.

Paper Details

Date Published: 9 September 2019
PDF: 19 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090M (9 September 2019); doi: 10.1117/12.2539527
Show Author Affiliations
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Ian Lacey, Lawrence Berkeley National Lab. (United States)
Thomas Arnold, Leibniz Institut of Surface Engineering (Germany)
Technische Univ. Dresden (Germany)
Hendrik Paetzelt, Leibniz-Institut of Surface Engineering (Germany)
Simon Rochester, Rochester Scientific, LLC (United States)
Frank Siewert, Helmholtz-Zentrum Berlin für Materialien und Energie (Germany)
Peter Z. Takacs, Surface Metrology Solutions, LLC (United States)


Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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