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Proceedings Paper

The use of laser printers for obtaining photomasks for the photolithography process
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Paper Abstract

For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

Paper Details

Date Published: 13 September 2019
PDF: 4 pages
Proc. SPIE 11204, 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 112040J (13 September 2019); doi: 10.1117/12.2539416
Show Author Affiliations
Kazimierz Gut, Silesian Univ. of Technology (Poland)
Sebastian Student, Silesian Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 11204:
14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods
Przemyslaw Struk; Tadeusz Pustelny, Editor(s)

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