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Proceedings Paper

Transmission measurement by using different wavelengths than designed wavelength
Author(s): Sen Han; Qiyuan Zhang; Haoyu Wang; Yan Wang
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Paper Abstract

Testing wavefront distortions at the design wavelength is critical for optical system qualification. Existing technologies and methods for measuring transmitted wavefronts typically operate at only a few specific wavelengths. In previous research, we propose a method for estimating the wavefront distortion of an optical transmission system in a broad bandwidth. We establish the relationship between the transmitted wavefront and wavelength, using Zernike fringe coefficients to represent the wavefront. We have also experimentally tested a single lens represents the monochromatic transmission system at four wavelengths with interferometers. The results show the monotonic Zernike-wavelength curves of in 400~1000nm bandwidth can be predicted by fitted Conrady formula with three data points. In this paper, we further test a doublet achromatic lens at five wavelengths with interferometers, and we find most Zernike-wavelength curves of the doublet achromatic lens are still monotonic, which can solved by binomial Conrady formula with two data points. Using three points to fit Conrady formula for part of monotonic curves is the same as using two points to solve binomial Conrady formula. However the Z8- wavelength curve which have an inflection point must solved by Conrady formula with three data points. The experimental results of achromatic system are more representative, it shows that Zernike-wavelength curve of achromatic system can be expressed by Conrady formula. In practice testing, if the wavefronts measuring at different wavelengths are accurate, the wavefront of arbitrarily wavelength in a certain band can be estimated by solving Conrady formula. Our experiment shows that the Conrady formula can represent the dispersion characteristics of some optical systems, especially for achromatic system. And the feasibility of measuring transmitted wavefront in a certain band based on Zernike coefficient is verified. The new method will help to simplify the process of multi-wavelength interferometric measurements.

Paper Details

Date Published: 18 November 2019
PDF: 11 pages
Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 1118907 (18 November 2019); doi: 10.1117/12.2539229
Show Author Affiliations
Sen Han, Univ. of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Qiyuan Zhang, Changchun Univ. of Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Haoyu Wang, Univ. of Shanghai for Science and Technology (China)
Yan Wang, Univ. of Shanghai for Science and Technology (China)

Published in SPIE Proceedings Vol. 11189:
Optical Metrology and Inspection for Industrial Applications VI
Sen Han; Toru Yoshizawa; Song Zhang; Benyong Chen, Editor(s)

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