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Proceedings Paper

Probe radius compensation based on aspherical surface reconstruction in CMM profile measurement
Author(s): Ang Li; Yonggang Wang; Jiyou Zhang
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Paper Abstract

Surface measurement by CMM is the main method in the process of large-aperture high order aspheric mirrors fabrication. Because of the existence of probe-radius error in measurement data, the achieved surface residual cannot be directly used in mirror fabrication. So the Probe-Radius Compensation Based on Aspherical Surface Reconstruction is proposed. The algorithm comes up with a high precision surface fitting model, which introduces coordinate system space deviation parameters and use this model to calculate compensation vectors to correct the probe-radius error. The experiment shows that there is only a deviation of 4nm between the corrected data and the real data and fully meets the needs of optical fabrication.

Paper Details

Date Published: 18 December 2019
PDF: 8 pages
Proc. SPIE 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation, 1134105 (18 December 2019); doi: 10.1117/12.2539107
Show Author Affiliations
Ang Li, Beijing Institute of Space Mechanics and Electricity (China)
China Academy of Space Technology (China)
Yonggang Wang, Beijing Institute of Space Mechanics and Electricity (China)
China Academy of Space Technology (China)
Jiyou Zhang, Beijing Institute of Space Mechanics and Electricity (China)
China Academy of Space Technology (China)


Published in SPIE Proceedings Vol. 11341:
AOPC 2019: Space Optics, Telescopes, and Instrumentation
Suijian Xue; Xuejun Zhang; Carl Anthony Nardell; Ziyang Zhang, Editor(s)

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