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Proceedings Paper

A case study of benefits for the "IOFF" MDP automation project: development, integration, and optimization of the Integrated-Optimized-Fracture-Flow (IOFF) into production
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Paper Abstract

Over the last few decades, the scope of MDP has evolved from a handful of simple tasks, to veritable “jack of all trades”, capable of an enormous array of functions, in several different operational scenarios. These functions range from machine-specific fractures, to Boolean operations, OPC, MPC, checking, and beyond, under various scenarios including specific hardware configurations (such as single CPU vs. cluster, memory size, type, and location), software configurations (including operating system, load balancing, and prioritization), and inputs and outputs (formats, sizes, and so forth). While this versatile capability of tools, such as Synopsys’ CATS software, is powerful, the expertise required to operate them efficiently keeping abreast of the changing requirements and capabilities, poses a significant challenge to the average user.

Paper Details

Date Published: 26 September 2019
PDF: 5 pages
Proc. SPIE 11148, Photomask Technology 2019, 111481L (26 September 2019); doi: 10.1117/12.2539039
Show Author Affiliations
Adam Smith, GLOBALFOUNDRIES (United States)
Hari Konnanur, Synopsys (United States)


Published in SPIE Proceedings Vol. 11148:
Photomask Technology 2019
Jed H. Rankin; Moshe E. Preil, Editor(s)

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