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Experimental study on defect detection method for spherical surface
Author(s): ChengRui Li; Xi Hou; XiaoSong Du; HaiYang Quan; XiaoChuan Hu
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Paper Abstract

With the development of optical manufacturing and measurement methods, precision optical elements are used extensively in various fields. As the beam scattering and energy loss caused by the surface defects of optical elements will reduce the lifetime of optical elements and the performance of optical systems, it is important to detect and evaluate the surface defects. However, several technical challenges remain in the surface defect detection of spherical optical elements. In this paper, a spherical defect detection experiment based on the dark-field imaging principle is proposed. The surfaces of two convex spherical optical elements are detected. Meanwhile, the illumination module is improved through experiments. The experimental results are compared with those of a white light interferometer, thereby demonstrating the validity of the method.

Paper Details

Date Published: 18 November 2019
PDF: 8 pages
Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 1118911 (18 November 2019); doi: 10.1117/12.2538863
Show Author Affiliations
ChengRui Li, Univ. of Electronic Science and Technology of China (China)
Institute of Optics and Electronics, Chinese Academy of Sciences (China)
Xi Hou, Institute of Optics and Electronics, (China)
XiaoSong Du, Univ. of Electronic Science and Technology of China (China)
HaiYang Quan, Institute of Optics and Electronics (China)
XiaoChuan Hu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 11189:
Optical Metrology and Inspection for Industrial Applications VI
Sen Han; Toru Yoshizawa; Song Zhang; Benyong Chen, Editor(s)

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