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Proceedings Paper

Simulation of transmission characteristics of Fabry-Perot filter on silicon substrate
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Paper Abstract

Transmission characteristics of Fabry-Perot (F-P) filter based on silicon substrate with different transmissivity of high reflection (HR) coatings, incident angle, and interference orders are investigated. The results show that the transmissivity of HR coatings has great effect on full width at half maximum (FWHM) of transmission spectrum, the FWHM of F-P filter reduced from 209 nm to 3.4 nm with the reflectivity of HR coatings increased from 84.7% to 99.6%. The peak wavelength shifts from 1546.3 nm at 0° to 1542.6 nm at 5°, indicating that the FWHM of transmission spectrum broadens as the incident angle increases. The 1st, 2nd, 3rd, and 4th order interference are 3.4 nm, 2.3 nm, 1.8 nm, and 1.5 nm, respectively. Thus, in the applications tuning in a narrow wavelength range, F-P filter can be designed to operate in high-order mode to achieve a narrow transmission spectrum.

Paper Details

Date Published: 18 November 2019
PDF: 6 pages
Proc. SPIE 11196, Infrared, Millimeter-Wave, and Terahertz Technologies VI, 111961R (18 November 2019); doi: 10.1117/12.2538805
Show Author Affiliations
Shaoyu Zhao, China Electronics Technology Group Corp. (China)
Jiang Chen, Shanghai Aerospace Equipment Manufacturer Co., Ltd. (China)
Weiping Wang, China Electronics Technology Group Corp. (China)
Dongliang Zhang, China Electronics Technology Group Corp. (China)
Xiaoyan Hu, China Electronics Technology Group Corp. (China)

Published in SPIE Proceedings Vol. 11196:
Infrared, Millimeter-Wave, and Terahertz Technologies VI
Cunlin Zhang; Xi-Cheng Zhang; Masahiko Tani, Editor(s)

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