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Topography measurement by normal-incidence reflection ptychography
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Paper Abstract

Ptychography is a widely used lensless coherent diffraction imaging approach, in which the complex transmittance function of the object is retrieved from a set of diffraction patterns originating from overlapping sample illumination area. In this paper, we propose a normal-incidence reflection ptychographic system. The sample and detector are located on each side of the beam splitter similarly to Michelson interferometer without reference beam. This system can reveal the topographic structure of reflective samples. Compared with Michelson interferometer based off-axis digital holography, the field-of-view of the proposed reflective ptychography is unlimited by the aperture of the detector.

Paper Details

Date Published: 18 November 2019
PDF: 9 pages
Proc. SPIE 11188, Holography, Diffractive Optics, and Applications IX, 1118815 (18 November 2019); doi: 10.1117/12.2537963
Show Author Affiliations
Chao Tang, Beijing Univ. of Technology (China)
Lu Rong, Beijing Univ. of Technology (China)
Fangrui Tan, Beijing Univ. of Technology (China)
Bing Li, Beijing Univ. of Technology (China)
Dayong Wang, Beijing Univ. of Technology (China)
Jie Zhao, Beijing Univ. of Technology (China)
Yunxin Wang, Beijing Univ. of Technology (China)


Published in SPIE Proceedings Vol. 11188:
Holography, Diffractive Optics, and Applications IX
Yunlong Sheng; Changhe Zhou; Liangcai Cao, Editor(s)

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