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A new method for non-destructive measuring of grating parameters
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Paper Abstract

At present, scanning electron microscopy (SEM) and atomic force microscopy (AFM) are the main means of measuring grating parameters. When SEM is used, irreversible damage will be caused to the sample. AFM can only detect small areas of samples. AFM is too inefficient for large area diffraction gratings. Therefore, non-destructive testing of grating groove shapes is very necessary. In this paper, the light intensity 、diffraction angle of first-order and diffracted light interferometric fringes are studied and a new method for non-destructive measuring of grating parameter is proposed. We will study the grating parameters based on the rigorous coupled wave theory (RCWA).

Paper Details

Date Published: 18 November 2019
PDF: 6 pages
Proc. SPIE 11188, Holography, Diffractive Optics, and Applications IX, 1118825 (18 November 2019); doi: 10.1117/12.2537840
Show Author Affiliations
Bilali Muhutijiang, Xinjiang Normal Univ. (China)
Wei Wei, Xinjiang Normal Univ. (China)
Keqiang Qiu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 11188:
Holography, Diffractive Optics, and Applications IX
Yunlong Sheng; Changhe Zhou; Liangcai Cao, Editor(s)

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