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Proceedings Paper

Research on full-aperture surface shape in-situ measurement technology for grinding large diameter optics
Author(s): Qiancai Wei; Lian Zhou; Xianhua Chen; Nan Zheng; Bo Zhong; Jian Wang
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Paper Abstract

Aiming at the disadvantage of small diameter, low efficiency, poor accuracy and can only measure sub-aperture of traditional contact surface shape measurement method to detect grinding optics surface, this paper uses non-contact laser displacement sensor, and proposes an in-situ measurement method to measure full-aperture surface of grinding optics, it has the characteristics of high measurement efficiency, high accuracy, large measurement aperture and the ability to measure full-aperture surface. This method is in-situ measurement, so it can measure full-aperture surface of optics with arbitrary aperture and shape after rough grinding, semi-precision grinding and fine grinding. Orthogonal co-directional grating measurement path can effectively avoid the influence of machine backlash. Therefore, the optics can be directly compensated according to the results of surface measurement, so that the surface of optics can meet the requirements. After the measurement is completed, a set of orthogonal measurement data are obtained, and the invalid data are manually clipped. Linear interpolation, nearest neighbor interpolation and cubic spline interpolation are used to interpolate the clipped data, and the orthogonal data are superimposed to obtain the final shape. The validity of this method is verified by the sub-aperture surface detection method, experiments show that the optimal surface measurement results can be obtained by cubic interpolation for both planar and aspheric optics. Using this method to compensate the grinding of 530mm×530mm 2-D off-axis aspheric optics, the full-aperture surface shape accuracy PV is better than 3.5μm.

Paper Details

Date Published: 18 November 2019
PDF: 9 pages
Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 111890P (18 November 2019); doi: 10.1117/12.2537798
Show Author Affiliations
Qiancai Wei, Research Ctr. of Laser Fusion (China)
Lian Zhou, Research Ctr. of Laser Fusion (China)
Xianhua Chen, Research Ctr. of Laser Fusion (China)
Nan Zheng, Research Ctr. of Laser Fusion (China)
Bo Zhong, Research Ctr. of Laser Fusion (China)
Jian Wang, Research Ctr. of Laser Fusion (China)

Published in SPIE Proceedings Vol. 11189:
Optical Metrology and Inspection for Industrial Applications VI
Sen Han; Toru Yoshizawa; Song Zhang; Benyong Chen, Editor(s)

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