Share Email Print
cover

Proceedings Paper

Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.

Paper Details

Date Published: 19 November 2019
PDF: 6 pages
Proc. SPIE 11183, Advanced Laser Processing and Manufacturing III, 111830U (19 November 2019); doi: 10.1117/12.2537672
Show Author Affiliations
A. V. Dostovalov, Institute of Automation and Electrometry (Russian Federation)
Novosibirsk State Univ. (Russian Federation)
K. A. Bronnikov, Institute of Automation and Electrometry (Russian Federation)
Novosibirsk State Univ. (Russian Federation)
D. A. Belousov, Institute of Automation and Electrometry (Russian Federation)
V. P. Korolkov, Institute of Automation and Electrometry (Russian Federation)
Novosibirsk State Univ. (Russian Federation)
S. A. Babin, Institute of Automation and Electrometry (Russian Federation)
Novosibirsk State Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 11183:
Advanced Laser Processing and Manufacturing III
Rongshi Xiao; Minghui Hong; Jian Liu; Jianhua Yao; Yuji Sano, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray