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Proceedings Paper

Microscopic fringe projection profilometry comparison based on stereoscopic microscope and telecentric lenses
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Paper Abstract

As the digital projector develops, fringe projection profilometry has been widely used in the fast 3D measurement. However, the field of view of traditional 3D measurement systems is commonly in decimeters, which limits the 3D reconstruction accuracy to tens of microns. If we want to improve the accuracy further, we have to minimize the field of view and meanwhile increase the fringe density in space. For this purpose, we developed two kinds of systems based on a stereo-microscope and telecentric lenses, respectively. We also studied the corresponding calibration frameworks and developed fast 3D measurement methods with both Fourier transform and phase- shifting algorithms for real-time 3D reconstruction of micro-scale objects.

Paper Details

Date Published: 18 November 2019
PDF: 5 pages
Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 1118909 (18 November 2019); doi: 10.1117/12.2537483
Show Author Affiliations
Yan Hu, Nanjing Univ. of Science and Technology (China)
Yichao Liang, Nanjing Univ. of Science and Technology (China)
Tianyang Tao, Nanjing Univ. of Science and Technology (China)
Wei Yin, Nanjing Univ. of Science and Technology (China)
Jiaming Qian, Nanjing Univ. of Science and Technology (China)
Shijie Feng, Nanjing Univ. of Science and Technology (China)
Chao Zuo, Nanjing Univ. of Science and Technology (China)
Qian Chen, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 11189:
Optical Metrology and Inspection for Industrial Applications VI
Sen Han; Toru Yoshizawa; Song Zhang; Benyong Chen, Editor(s)

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