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Proceedings Paper

Thermal deformation measurement of Al2O3 ceramic substrate based on radial basis function
Author(s): Linlin Wang; Chen Tang; YuHui Ma; XiYuan Li
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Paper Abstract

In this paper, the method of Radial basis function(RBF) to Electronic Speckle Pattern Interferometry (ESPI)information extraction is studied, mainly including: the filtering method based on radial basis function for ESPI fringe patterns with wide density; introducing the radial basis function to interpolate the number of fringe in the fringe skeleton method. Thermal deformation phase measurement of Al2O3 ceramic substrate at the circumstance of thermal load was estimated based on the ESPI. In the experiment, four ESPI fringe patterns at different moment at the beginning of the experiment were captured. The RBF filtering method and the fringe skeleton method with RBF interpolating were used to estimating the thermal deformation phase measurement. The acquiring out-of-plane displacements by our method were in good agreement with the real deformation under the stepped-up thermal load gradually. This measurement can provide assistance for studying the performance of ceramic substrate in the process of laser processing.

Paper Details

Date Published: 8 July 2019
PDF: 7 pages
Proc. SPIE 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers, 110630U (8 July 2019); doi: 10.1117/12.2537449
Show Author Affiliations
Linlin Wang, Shenyang Aerospace Univ. (China)
Chen Tang, Univ. of Tianjin (China)
YuHui Ma, Shenyang Aerospace Univ. (China)
XiYuan Li, Shenyang Aerospace Univ. (China)


Published in SPIE Proceedings Vol. 11063:
Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)

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