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Proceedings Paper

Low cost test system for silicon photonics testing
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Paper Abstract

IMECAS is developing a silicon photonics process platform based on existing 22nm CMOS platform. Developing this platform requires continuous process optimization and design verification, so the wafer-level test solution presented in this paper plays an extremely important role in process validation and optimization. We design a test station which enables manual and semi-automatic for optical and electro-optical testing of passive and active silicon photonics components and circuits, including waveguides, grating couplers, splitter, photo-detectors, modulators etc. It is compatible with 200mm wafer-level testing and Die-level testing. Meanwhile, it has two coupling ways: horizontal coupling and vertical coupling. The measured repeatability of S-parameters and IV is within 6α.

Paper Details

Date Published: 20 November 2019
PDF: 5 pages
Proc. SPIE 11192, Real-time Photonic Measurements, Data Management, and Processing IV, 1119210 (20 November 2019); doi: 10.1117/12.2537170
Show Author Affiliations
Peng Zhang, Univ. of Science and Technology of China (China)
Institute of Microelectronics (China)
Bo Tang, Institute of Microelectronics (China)
Bin Li, Institute of Microelectronics (China)
Yan Yang, Institute of Microelectronics (China)
Ruonan Liu, Institute of Microelectronics (China)
TingTing Li, Institute of Microelectronics (China)
Zhihua Li, Institute of Microelectronics (China)
Fujiang Lin, Univ. of Science and Technology of China (China)

Published in SPIE Proceedings Vol. 11192:
Real-time Photonic Measurements, Data Management, and Processing IV
Ming Li; Bahram Jalali; Mohammad Hossein Asghari, Editor(s)

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