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Proceedings Paper

Transient microscopic testing method based on deflectometry
Author(s): Hanting Gu; Daodang Wang; Zhongming Xie; Ming Kong; Rongguang Liang; Wentao Zhang
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Paper Abstract

The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

Paper Details

Date Published: 19 November 2019
PDF: 6 pages
Proc. SPIE 11185, Optical Design and Testing IX, 111850R (19 November 2019); doi: 10.1117/12.2537149
Show Author Affiliations
Hanting Gu, China Jiliang Univ. (China)
Daodang Wang, China Jiliang Univ. (China)
Zhongming Xie, China Jiliang Univ. (China)
Ming Kong, China Jiliang Univ. (China)
Rongguang Liang, James C. Wyant College of Optical Sciences, Univ. of Arizon (United States)
Wentao Zhang, Guilin Univ. of Electronic Technology (China)


Published in SPIE Proceedings Vol. 11185:
Optical Design and Testing IX
Yongtian Wang; Pablo Benítez; Osamu Matoba, Editor(s)

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