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Proceedings Paper

Large-scale freeform surface ultra-thin film coating uniformity measurement based on a dynamic spectroscopic ellipsometer
Author(s): Daesuk Kim; Vamara Dembele
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Paper Abstract

We describe a novel dynamic spectroscopic ellipsometer and its advanced imaging spectro-ellipsometric scheme based on one-piece polarizing interferometric module. The proposed dynamic spectroscopic ellipsometer requires neither moving parts nor time dependent polarization modulation for extracting spectroscopic ellipsometric parameters. By employing a snapshot single spectral data, we reconstruct spatially resolved spectral ellipsometric information of ultrathin films coated on a freeform surface with high precision and accuracy. The dynamic measurement capability of the proposed imaging spectro-ellipsometer is demonstrated for large-scale periodic nano-patterns fabricated on roll surface.

Paper Details

Date Published: 15 November 2019
PDF: 8 pages
Proc. SPIE 11175, Optifab 2019, 111751L (15 November 2019); doi: 10.1117/12.2536978
Show Author Affiliations
Daesuk Kim, Chonbuk National Univ. (Korea, Republic of)
Vamara Dembele, Chonbuk National Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 11175:
Optifab 2019
Blair L. Unger; Jessica DeGroote Nelson, Editor(s)

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