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Design and fabrication of tunable inductors based on vanadium dioxide thin film
Author(s): Eunsung Shin; Liangyu Li; Kuan-Chang Pan; Guru Subramanyam
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Paper Abstract

Vanadium dioxide (VO2) is a well-known phase change material that shows a metal to insulator transition at temperatures near 68 °C. It has many potential applications in science and engineering. In this study, VO2 thin film based planar spiral tunable inductors were designed and fabricated on a sapphire substrate. This approach can be a potential solution for reconfigurable RF/microwave wireless communication systems. According to the experimental results, fabricated inductors show a 43.4 % (from 2.19 nH to 1.24 nH) tuning range at 2 GHz when the VO2 thin film layer undergoes the insulator-to-metal transition from room temperature to temperatures above the transition. This result confirms that the proposed inductor structure was fully functional with the successful inductance tuning capability.

Paper Details

Date Published: 6 December 2019
PDF: 6 pages
Proc. SPIE 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019, 113710A (6 December 2019); doi: 10.1117/12.2536937
Show Author Affiliations
Eunsung Shin, Univ. of Dayton (United States)
Liangyu Li, Univ. of Dayton (United States)
Kuan-Chang Pan, Univ. of Dayton (United States)
Guru Subramanyam, Univ. of Dayton (United States)


Published in SPIE Proceedings Vol. 11371:
International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019
Partha Banerjee; Karl Gudmundsson; Akhlesh Lakhtakia; Guru Subramanyam, Editor(s)

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