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Study on the performances of dwell time algorithms in ion beam figuring
Author(s): Tianyi Wang; Lei Huang; Kashmira Tayabaly; Mourad Idir
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Paper Abstract

Dwell time calculation is one of the most important process in a highly deterministic computer-controlled Ion Beam Figuring (IBF) process. It is modeled as a deconvolution process between the desired removal map and the beam removal function, which is an ill-posed inverse problem. A good dwell time solution should fulfill four requirements: 1) it must be non-negative; 2) it should closely duplicate the shape of the desired removal map; 3) the total dwell time is expected to be as short as possible; 4) the calculation time is reasonable. Dwell time algorithms, such as Fourier transform-based algorithm, matrix-based algorithm, and Bayesian-based algorithm, have been proposed and applied to IBF. However, their performances were never clearly examined and described accordingly. In this research, we provide a quantitative study on the performances of these dwell time algorithms based on the aforementioned four requirements.

Paper Details

Date Published: 15 November 2019
PDF: 10 pages
Proc. SPIE 11175, Optifab 2019, 111750M (15 November 2019); doi: 10.1117/12.2536869
Show Author Affiliations
Tianyi Wang, Brookhaven National Lab. (United States)
Lei Huang, Brookhaven National Lab. (United States)
Kashmira Tayabaly, Brookhaven National Lab. (United States)
Mourad Idir, Brookhaven National Lab. (United States)


Published in SPIE Proceedings Vol. 11175:
Optifab 2019
Blair L. Unger; Jessica DeGroote Nelson, Editor(s)

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