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Thin film capacitors made of various metals for impedance sensing technique
Author(s): D. Zarzeczny
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Paper Abstract

The article is devoted to measuring matrices that can be used to determine the impact of a given material on a biological substance in BioMEMS devices. The focus is on the use of the ECIS system. The test consists in measuring the impedance of cells through which a low-current current is passed. As part of the conducted research, based on the commercial matrixes of the ECIS system, special test plates were designed and made on a biocompatible polycarbonate substrate. Titanium, nichrome, nickel and copper were used. The first measurements characterizing the structures made were carried out.

Paper Details

Date Published: 6 November 2019
PDF: 9 pages
Proc. SPIE 11176, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019, 1117654 (6 November 2019); doi: 10.1117/12.2536787
Show Author Affiliations
D. Zarzeczny, Lublin Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 11176:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019
Ryszard S. Romaniuk; Maciej Linczuk, Editor(s)

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