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Wavefront improvement by IBF-processed correction surfaces
Author(s): Roman Feldkamp
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Paper Abstract

Within the modern production of high-precision optics, Ion Beam Figuring (IBF) is an established machining process. IBF uses an ion beam with a Gaussian particle distribution. Atoms are sputtered from the workpiece surface by accelerated ions. Compared to other correction methods (e.g. MRF) IBF provides a significantly smaller tool, enabling precise and deterministic results. The machining takes place contactless in vacuum. Thus the technology qualifies for many unique application possibilities in the production of high performance optics. After a brief introduction to the basics of IBFtechnology, this article features various industrial applications: The nanometer accurate correction of optical surfaces, the correction of angular errors as well as smoothing, structuring and decoating of lenses will be presented. Focus of the lecture is the improvement of wavefronts in optical systems using IBF-processed correction surfaces. The complete process is presented and illustrated with examples and results.

Paper Details

Date Published: 15 November 2019
PDF: 8 pages
Proc. SPIE 11175, Optifab 2019, 111750L (15 November 2019); doi: 10.1117/12.2536776
Show Author Affiliations
Roman Feldkamp, JENOPTIK Optical Systems GmbH (Germany)


Published in SPIE Proceedings Vol. 11175:
Optifab 2019
Blair L. Unger; Jessica DeGroote Nelson, Editor(s)

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