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Proceedings Paper

Large dies stitching: a technical and cross-functional teams challenge
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Paper Abstract

This paper addresses large dies stitching challenges. Stitching is a way to combine several shots "stitched together" to create a die larger than what can fit on a photomask. This technique that was originally dedicated to advanced research is now more widely used and requires a fully automated industrial flow. Technical constraints come from a number of different actors and results must be shared by even more teams. We will present the methodology used to optimize both the yield and the data exchange between cross-functional teams. We will show how this automated flow can be easily customized to save more silicon thanks to advanced dicing techniques.

Paper Details

Date Published: 26 September 2019
PDF: 10 pages
Proc. SPIE 11148, Photomask Technology 2019, 111481A (26 September 2019); doi: 10.1117/12.2536739
Show Author Affiliations
Philippe Morey-Chaisemartin, XYALIS (France)
Eric Beisser, XYALIS (France)
Frederic Brault, XYALIS (France)
Farid Benzakour, XYALIS (France)


Published in SPIE Proceedings Vol. 11148:
Photomask Technology 2019
Jed H. Rankin; Moshe E. Preil, Editor(s)

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