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Subsurface damage measurement of single crystal germanium and borosilicate glass BK-7
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Paper Abstract

We present a new experimental method for measuring subsurface damage (SSD) on ground surfaces of single crystal germanium and borosilicate glass BK-7 based on the morphology and mechanical properties dependence on depth into the material. The material selection allows us to compare crystalline and non-crystalline materials. We use spots of different penetration depths on ground surfaces by Magnetorheological Finishing (MRF) spots to remove part or all of the damaged layer, and then evaluate the surface roughness, fracture toughness and material removal rate (MRR) of MRF at the deepest point penetration of MRF fluid into the spot. The dependence of these results on penetration depth into the material reveals the subsurface damage of the surfaces. It is shown that the subsurface damage depths revealed by each property (surface roughness, MRR, fracture toughness) match each other.

Paper Details

Date Published: 15 November 2019
PDF: 8 pages
Proc. SPIE 11175, Optifab 2019, 1117508 (15 November 2019); doi: 10.1117/12.2536691
Show Author Affiliations
Jing Xu, Univ. of Rochester (United States)
Lauren Taylor, Chester F. Carlson Ctr. for Imaging Science, Rochester Institute of Technology (United States)
Jie Qiao, Chester F. Carlson Ctr. for Imaging Science, Rochester Institute of Technology (United States)
Michael Pomerantz, Univ. of Rochester (United States)
John C. Lambropoulos, Univ. of Rochester (United States)


Published in SPIE Proceedings Vol. 11175:
Optifab 2019
Blair L. Unger; Jessica DeGroote Nelson, Editor(s)

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