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Proceedings Paper

Development of a reflective spiral phase plate based on MRF polishing
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Paper Abstract

In this paper, we propose a fabrication process based on Magneto-Rheological Finishing (MRF) for a reflective Spiral Phase Plate (SPP) with a continuous surface. The front surface of a nickel-plated aluminum disk is machined by diamond turning as a plane mirror, and spiral structure with low topological charge is generated by sub-aperture polishing tools, i.e., MRF. Interferometers are used to analyze the smoothness of the spiral structure, steepness of the center step and surface roughness of the random areas for the fabricated SPP. The results indicate that the direct-polishing approach can be a promising technique to fabricate high-precision SPPs.

Paper Details

Date Published: 15 November 2019
PDF: 7 pages
Proc. SPIE 11175, Optifab 2019, 1117526 (15 November 2019); doi: 10.1117/12.2536573
Show Author Affiliations
Min-Woo Jeon, Korea Basic Science Institute (Korea, Republic of)
Sang-Won Hyun, Korea Basic Science Institute (Korea, Republic of)
Seok-Kyeong Jeong, Korea Basic Science Institute (Korea, Republic of)
Chungnam National Univ. (Korea, Republic of)
Jong-Gyun Kang, Korea Basic Science Institute (Korea, Republic of)
Chungnam National Univ. (Korea, Republic of)
Woo-Jong Yeo, Korea Basic Science Institute (Korea, Republic of)
Chungnam National Univ. (Korea, Republic of)
Geon-Hee Kim, Korea Basic Science Institute (Korea, Republic of)


Published in SPIE Proceedings Vol. 11175:
Optifab 2019
Blair L. Unger; Jessica DeGroote Nelson, Editor(s)

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